Meeting these evolving demands, Micro-Epsilon introduces a completely new generation of high-precision tools: the scanCONTROL 8500 series laser scanners. These high-performance 3D sensor solutions are ...
Micro-Epsilon releases 3DInspect v3.1 with new 2D and 3D measurement tools, expanded sensor support and workflow enhance ...
Sensors measure coplanarity of wafers in hybrid bonding and perform multi-segment measurements on superconducting strip. 02/09/2026 Micro-Epsilon UK Ltd. The production of superco ...
德國精密感測領導品牌Micro-Epsilon米銥集團，2026台北國際自動化工業大展以全新3D產品開發平台為核心，推出新世代3D綠光線雷射輪廓儀及線上3D測厚系統，透過整合式架構重新定義智慧製造的3D量測流程。
另一款全球首發的reflectCONTROL，則瞄準整片12吋晶圓量測。針對晶圓高反光表面特性，採用3D偏折量測技術，具備高解析度與微米級精度，每次量測可取得高達500萬個數據點，完整還原晶圓3D表面形貌，從全表面掌握晶圓翹曲與平坦度變化。速度更是r ...
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